From beckwith at snf.stanford.edu Tue Jan 22 10:05:23 2002 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 22 Jan 2002 10:05:23 -0800 Subject: turbo long pump down time Message-ID: >Delivered-To: beckwith at snf.stanford.edu >Mailing-List: contact amtetcher-pcs-help at snf.stanford.edu; run by ezmlm >X-No-Archive: yes >List-Post: >List-Help: >List-Unsubscribe: >List-Subscribe: >Delivered-To: mailing list amtetcher-pcs at snf.stanford.edu >Subject: Problem amtetcher 2002-01-20 18:36:39: turbo pumpdown slow.. >Date: Jan 20, 2002 6:36:41 PM >From: narya at snf.stanford.edu >To: amtetcher-pcs at snf.stanford.edu > >I had 24 wafers loaded and was running Std Oxide Etch. >The machine would take a lot of time to pumpdown to >the required base pressure (0.2) Last week I loaded one wafer in each of the 6 trays, it took 10 minutes for the turbo to pump down. The longer you leave the bell jar open, the longer it will take for the chamber to pump down. Len is correct, this is due to the fact that the cryo pump is no longer being used. Narya, it would be helpful if you could provide an actual time. Please take this into consideration when you make your reservations. Sharleen From PZwahlen at zyomyx.com Wed Jan 23 21:26:02 2002 From: PZwahlen at zyomyx.com (Zwahlen, Pascal) Date: Wed, 23 Jan 2002 21:26:02 -0800 Subject: removed my reservation for Thursday 11am to 1pm Message-ID: Pascal Zwahlen From yyao at intpax.com Sun Jan 27 18:29:56 2002 From: yyao at intpax.com (Yahong Yao) Date: Sun, 27 Jan 2002 20:29:56 -0600 Subject: cancel reservation: 10:00-11:30 Monday Message-ID: <3C54B7A4.F9812FF2@intpax.com> Sorry for the tardy notice. Yahong From narya at Stanford.EDU Mon Jan 28 10:01:22 2002 From: narya at Stanford.EDU (Niranjan Anand Talwalkar) Date: Mon, 28 Jan 2002 10:01:22 -0800 (PST) Subject: reservation cancelled.. Message-ID: <200201281801.g0SI1MD24256@saga4.Stanford.EDU> Hi, sorry for the late notice but litho equipment has problem. Reservation cancelled for 11:00am today. -Niranjan