turbo long pump down time
beckwith at snf.stanford.edu
Tue Jan 22 10:05:23 PST 2002
>Delivered-To: beckwith at snf.stanford.edu
>Mailing-List: contact amtetcher-pcs-help at snf.stanford.edu; run by ezmlm
>List-Post: <mailto:amtetcher-pcs at snf.stanford.edu>
>List-Help: <mailto:amtetcher-pcs-help at snf.stanford.edu>
>List-Unsubscribe: <mailto:amtetcher-pcs-unsubscribe at snf.stanford.edu>
>List-Subscribe: <mailto:amtetcher-pcs-subscribe at snf.stanford.edu>
>Delivered-To: mailing list amtetcher-pcs at snf.stanford.edu
>Subject: Problem amtetcher 2002-01-20 18:36:39: turbo pumpdown slow..
>Date: Jan 20, 2002 6:36:41 PM
>From: narya at snf.stanford.edu
>To: amtetcher-pcs at snf.stanford.edu
>I had 24 wafers loaded and was running Std Oxide Etch.
>The machine would take a lot of time to pumpdown to
>the required base pressure (0.2)
Last week I loaded one wafer in each of the 6 trays, it took 10
minutes for the turbo to pump down. The longer you leave the bell jar
open, the longer it will take for the chamber to pump down. Len is
correct, this is due to the fact that the cryo pump is no longer
being used. Narya, it would be helpful if you could provide an actual
Please take this into consideration when you make your reservations.
More information about the amtetcher