From hphan at snf.stanford.edu  Mon Oct 21 16:26:59 2002
From: hphan at snf.stanford.edu (Henry Phan)
Date: Mon, 21 Oct 2002 16:26:59 -0700
Subject: Cleaning Chamber
Message-ID: <3DB48D43.5FC6F4EF@snf.stanford.edu>

Dear User:
I ran an etch back Process today and replaced all the dummy wafers. I
also clean the polymer inside the chamber. I finished at 4:15pm today.
Whoever wants to use the AMT, Please run at least 15min seasoning.

--
Henry
_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650)725-3659
hphan at snf.stanford.edu