From booth at snf.stanford.edu  Wed Apr  9 08:47:08 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Wed, 09 Apr 2003 08:47:08 -0700
Subject: AMTetcher
Message-ID: <3E94407C.184025A2@snf.stanford.edu>

AMTetcher users -
	The AMT will remain shutdown for repair of arcing
on several trays, and also for unscheduled pump maintenance.
It will probably be available for normal processing tomorrow
afternoon (4/10).		Len


From sigari at snf.stanford.edu  Thu Apr 17 09:57:21 2003
From: sigari at snf.stanford.edu (Elaheh Sigari)
Date: Thu, 17 Apr 2003 09:57:21 -0700 (PDT)
Subject: canceled reservation (fwd)
Message-ID: <Pine.LNX.4.04.10304170956550.17113-100000@snf.stanford.edu>



---------- Forwarded message ----------
Date: Thu, 17 Apr 2003 08:35:21 -0700 (PDT)
From: Elaheh Sigari <sigari at snf.stanford.edu>
To: amt at snf.stanford.edu
Subject: canceled reservation

I don't have my wafers ready. I canceled my reservation from 11:30 to 2:00
pm
Elaheh





From hphan at snf.stanford.edu  Fri Apr 18 10:52:38 2003
From: hphan at snf.stanford.edu (Henry Phan)
Date: Fri, 18 Apr 2003 10:52:38 -0700
Subject: AMT
Message-ID: <3EA03B65.4629DCE5@snf.stanford.edu>

Dear User:
I made some change on process #6 Si Trench etch. Please check it out
before you run.

--
Henry
_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650)725-3659
hphan at snf.stanford.edu