AMT

Henry Phan hphan at snf.stanford.edu
Fri Apr 18 10:52:38 PDT 2003


Dear User:
I made some change on process #6 Si Trench etch. Please check it out
before you run.

--
Henry
_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650)725-3659
hphan at snf.stanford.edu





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