From eenriquez at snf.stanford.edu  Mon Dec 13 09:27:33 2004
From: eenriquez at snf.stanford.edu (Elmer Enriquez)
Date: Mon, 13 Dec 2004 09:27:33 -0800
Subject: Status of AMTetcher
Message-ID: <41BDD105.3000203@snf.stanford.edu>

AMT etcher users,
     The amtetcher is currently down for the hexode rotation which also 
disables the "chamber down" buttons.  The system itself however is fully 
operational.  In order to operate the etcher, wafers can only be loaded 
on the 3 front trays and maintenance then need to manually lower the 
chamber.  After that, the system can be operated normally.  Maintenance 
will again need to lower the chamber after the processed wafers have 
been unloaded.  For now I will leave the system in a shutdown condition 
but please contact maintenance if you need to operate the AMTetcher.

Regards,

Elmer