From gladys at snf.stanford.edu Tue Sep 7 08:38:18 2004 From: gladys at snf.stanford.edu (Gladys Sarmiento) Date: Tue, 07 Sep 2004 08:38:18 -0700 Subject: cancelled reservation Message-ID: <413DD5EA.1020800@snf.stanford.edu> I cancelled my afternoon reservation today. Gladys -- Gladys Sarmiento Stanford Nanofabrication Facility 420 Via Mall, CIS 145 Stanford, CA 94305-4070 (650) 725-6199 gladys at snf.stanford.edu From mcvittie at snf.stanford.edu Thu Sep 9 13:17:13 2004 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Thu, 09 Sep 2004 13:17:13 -0700 Subject: Arcing Problem Update for AMT etcher Message-ID: <4140BA48.8471326E@snf.stanford.edu> AMT Users, I was asked today about what we are doing about the arcing problem. Here is my latest thinking: * I expect that the cause is a hardware problem which we have not been able to identify. * The likely mechanism is a hollow cathode induced currect filement from the plasma to bare metal regions on the cathode/hexode. * A possible solution is to reduce the pressure. A lower pressure will increase the sheath thicknes and thus should reduce the hollow cathode effect. Elmer has done some tests which indeed show that arcing increases at higher pressure. * Nancy has done some etch rate tests for program #3 at 40, 45 and 50 mT. The results are as follows: Pressure C T B R L Avr 50mT 318 324 306 313 306 313.4 45mT 324 329 310 320 315 319.6 40mT 370 376 353 360 356 363.0 So it looks like we can go down in pressure to reduce the arcing and actually get an increase in etch rate. I was surprized with the results in that I expected a decrease in etch rate with pressure. I am now looking for a volunteer to test program #3 at 40 mT on patterned wafers. Thanks, Jim -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: From okilic at stanford.edu Mon Sep 13 13:20:53 2004 From: okilic at stanford.edu (Onur KILIC) Date: Mon, 13 Sep 2004 13:20:53 -0700 Subject: amt free 14:00-16:00 Message-ID: <1095106853.41460125b4325@webmail.stanford.edu> amt free 14:00-16:00 -- Onur KILI? PhD Candidate Applied Physics Stanford University, CA