From latta at snf.stanford.edu  Fri Jun  3 09:57:59 2005
From: latta at snf.stanford.edu (Nancy Latta)
Date: Fri, 03 Jun 2005 09:57:59 -0700
Subject: Etch rate poll
Message-ID: <42A08C17.2090402@snf.stanford.edu>

Folks,

One of our student workers has been looking into the etch rates for the 
tool and before we release the results we would like to check them 
against any results you might have gotten for your work.  Our interest 
is in all materials for the programs Trench, Standard Oxide, Via Etch, 
Etchback (5) and Etchback (7).

Thanks in advance for any etch rates you might be able to provide us with.

-Nancy