Etch rate poll

Nancy Latta latta at snf.stanford.edu
Fri Jun 3 09:57:59 PDT 2005


Folks,

One of our student workers has been looking into the etch rates for the 
tool and before we release the results we would like to check them 
against any results you might have gotten for your work.  Our interest 
is in all materials for the programs Trench, Standard Oxide, Via Etch, 
Etchback (5) and Etchback (7).

Thanks in advance for any etch rates you might be able to provide us with.

-Nancy



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