From djwong at stanford.edu  Fri May  6 13:35:32 2005
From: djwong at stanford.edu (Dawson Wong)
Date: Fri, 6 May 2005 13:35:32 -0700
Subject: Wafer Pieces in AMT
Message-ID: <001601c5527b$268c9690$0100000a@dawson600m>

Hi all,

I am looking to etch 40nm of thermal oxide on Si pieces. Can anyone suggest 
a method to attach Si pieces onto dummy wafers to process in the AMT and/or 
a suitable recipe to use? Thanks.

- Dawson