Wafer Pieces in AMT

Dawson Wong djwong at stanford.edu
Fri May 6 13:35:32 PDT 2005


Hi all,

I am looking to etch 40nm of thermal oxide on Si pieces. Can anyone suggest 
a method to attach Si pieces onto dummy wafers to process in the AMT and/or 
a suitable recipe to use? Thanks.

- Dawson 




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