Vacuum Leak

Cesar M Baxter cbax at stanford.edu
Tue Dec 12 18:07:18 PST 2006



 To All Users,

 The system had a big vacuum leak, the foreline only rough
 down to 500+mt. I isolate the foreline from the chamber and
 the foreline pump down to <20mt, will continue to troubleshoot
 tomorrow.


 Cesar



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