Vacuun Leak
Cesar M Baxter
cbax at stanford.edu
Wed Dec 13 16:03:36 PST 2006
To All,
The chamber has a big vacuum leak, it only pump down to 500+mt.
We pin point were the leak is, at the isolation valve between the
chamber and turbo pump. We removed the isolation valve gate and
were swapping it with the cryo isolation valve(not being use). Possible
we can get the chamber back under vacuum tomorrow and leak check, if the
chamber pass leak check will take tool out of shutdown...
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