AMT etcher seems to be working fine

[Benjamin Chui]

Hi all,
   
   This morning when Cesar and Elmer had finished repairing the AMT, I
went in and did an etch (prog 3 for 40 min to remove 1 um oxide plus
overetch).  Everything worked fine.  I've deleted my reservations for
the rest of today.

Happy etching,

Ben



 
____________________________________________________________________________________
Any questions? Get answers on any topic at www.Answers.yahoo.com.  Try it now.