From elmere at stanford.edu Wed Jan 3 18:37:24 2007 From: elmere at stanford.edu (Elmer Enriquez) Date: Wed, 03 Jan 2007 18:37:24 -0800 Subject: AMTetcher update Message-ID: <459C6864.7030104@stanford.edu> Currently the system is still down. We have repaired the hoist but now have a problem with the system not sensing when the chamber is at atmosphere. We believe that the "at atmosphere" switch is the cause for the hoist problem. The switch activated to soon which enabled the user to raise the chamber even though it's still under partial vacuum. We are continuing to troubleshoot. From nlatta at stanford.edu Fri Jan 12 09:32:36 2007 From: nlatta at stanford.edu (Nancy Latta) Date: Fri, 12 Jan 2007 09:32:36 -0800 Subject: New Fusion tool for UV cure Message-ID: <45A7C634.1040207@stanford.edu> Folks, Recently Paul Rissman requested labmembers to use the fusion tool for testing before turning over for general lab use. In the tests that he and I did last week it appears as though the tool could be a great replacement for our 'UV cure and super bake' procedure. It is much faster and does a good job of stopping the resist burning issues we see with long (over 10 mins) etches. The fusion might be worth looking into for those of you with long etches using photoresist masks. -Nancy From ben.jian at arrayedfiberoptics.com Fri Jan 12 10:39:36 2007 From: ben.jian at arrayedfiberoptics.com (=?iso-8859-1?Q?ben.jian?=) Date: Fri, 12 Jan 2007 18:39:36 +0000 Subject: New Fusion tool for UV cure Message-ID: <20070112183936.26747.qmail@server266.com> Nancy, This machine does look like a wonder machine. What is the cycle time for this machine? Does it take one wafer at a time or take multiple wafers? Ultimately, what is the throughput of this machine? Thanks. Ben Jian -------Original Message------- From: Nancy Latta Subject: New Fusion tool for UV cure Sent: 12 Jan '07 17:32 Folks, Recently Paul Rissman requested labmembers to use the fusion tool for testing before turning over for general lab use. In the tests that he and I did last week it appears as though the tool could be a great replacement for our 'UV cure and super bake' procedure. It is much faster and does a good job of stopping the resist burning issues we see with long (over 10 mins) etches. The fusion might be worth looking into for those of you with long etches using photoresist masks. -Nancy -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Fri Jan 12 10:57:18 2007 From: jimkruger at yahoo.com (jim kruger) Date: Fri, 12 Jan 2007 10:57:18 -0800 (PST) Subject: New Fusion tool for UV cure In-Reply-To: <20070112183936.26747.qmail@server266.com> Message-ID: <933133.67887.qm@web38910.mail.mud.yahoo.com> Automatic cassette to cassette, flexible wafer size but set up for 100 mm. Does 1 wafer at a time, 1 or 2 or 3 minutes depending on recipe (2 min. typical) jimkruger --- "ben.jian" wrote: > Nancy, > > This machine does look like a wonder machine. What > is the cycle time for > this machine? Does it take one wafer at a time or > take multiple wafers? > Ultimately, what is the throughput of this machine? > > Thanks. > > Ben Jian > > > -------Original Message------- > From: Nancy Latta > Subject: New Fusion tool for UV cure > Sent: 12 Jan '07 17:32 > > Folks, > > Recently Paul Rissman requested labmembers to use > the fusion tool for > testing before turning over for general lab use. > In the tests that he > and I did last week it appears as though the tool > could be a great > replacement for our 'UV cure and super bake' > procedure. It is much > faster and does a good job of stopping the resist > burning issues we see > with long (over 10 mins) etches. > > The fusion might be worth looking into for those > of you with long etches > > using photoresist masks. > > -Nancy > ____________________________________________________________________________________ Need a quick answer? Get one in minutes from people who know. Ask your question on www.Answers.yahoo.com