New Fusion tool for UV cure

Nancy Latta nlatta at
Fri Jan 12 09:32:36 PST 2007


Recently Paul Rissman requested labmembers to use the fusion tool for 
testing before turning over for general lab use.  In the tests that he 
and I did last week it appears as though the tool could be a great 
replacement for our 'UV cure and super bake' procedure.  It is much 
faster and does a good job of stopping the resist burning issues we see 
with long (over 10 mins) etches.

The fusion might be worth looking into for those of you with long etches 
using photoresist masks.


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