New Fusion tool for UV cure

ben.jian ben.jian at
Fri Jan 12 10:39:36 PST 2007


This machine does look like a wonder machine.  What is the cycle time for
this machine?  Does it take one wafer at a time or take multiple wafers?
Ultimately,  what is the throughput of this machine?


Ben Jian

	-------Original Message-------
  From: Nancy Latta
  Subject: New Fusion tool for UV cure
  Sent: 12 Jan '07 17:32


  Recently Paul Rissman requested labmembers to use the fusion tool for
  testing before turning over for general lab use. In the tests that he
  and I did last week it appears as though the tool could be a great
  replacement for our 'UV cure and super bake' procedure. It is much
  faster and does a good job of stopping the resist burning issues we see
  with long (over 10 mins) etches.

  The fusion might be worth looking into for those of you with long etches

  using photoresist masks.

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