New Fusion tool for UV cure
jimkruger at yahoo.com
Fri Jan 12 10:57:18 PST 2007
Automatic cassette to cassette, flexible wafer size
but set up for 100 mm.
Does 1 wafer at a time, 1 or 2 or 3 minutes depending
on recipe (2 min. typical)
--- "ben.jian" <ben.jian at arrayedfiberoptics.com>
> This machine does look like a wonder machine. What
> is the cycle time for
> this machine? Does it take one wafer at a time or
> take multiple wafers?
> Ultimately, what is the throughput of this machine?
> Ben Jian
> -------Original Message-------
> From: Nancy Latta
> Subject: New Fusion tool for UV cure
> Sent: 12 Jan '07 17:32
> Recently Paul Rissman requested labmembers to use
> the fusion tool for
> testing before turning over for general lab use.
> In the tests that he
> and I did last week it appears as though the tool
> could be a great
> replacement for our 'UV cure and super bake'
> procedure. It is much
> faster and does a good job of stopping the resist
> burning issues we see
> with long (over 10 mins) etches.
> The fusion might be worth looking into for those
> of you with long etches
> using photoresist masks.
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