New Fusion tool for UV cure

jim kruger jimkruger at yahoo.com
Fri Jan 12 10:57:18 PST 2007


Automatic cassette to cassette, flexible wafer size
but set up for 100 mm.

Does 1 wafer at a time, 1 or 2 or 3 minutes depending
on recipe (2 min. typical)

jimkruger




--- "ben.jian" <ben.jian at arrayedfiberoptics.com>
wrote:

> Nancy,
> 
> This machine does look like a wonder machine.  What
> is the cycle time for
> this machine?  Does it take one wafer at a time or
> take multiple wafers?
> Ultimately,  what is the throughput of this machine?
> 
> Thanks.
> 
> Ben Jian
> 
> 
> 	-------Original Message-------
>   From: Nancy Latta
>   Subject: New Fusion tool for UV cure
>   Sent: 12 Jan '07 17:32
> 
>   Folks,
> 
>   Recently Paul Rissman requested labmembers to use
> the fusion tool for
>   testing before turning over for general lab use.
> In the tests that he
>   and I did last week it appears as though the tool
> could be a great
>   replacement for our 'UV cure and super bake'
> procedure. It is much
>   faster and does a good job of stopping the resist
> burning issues we see
>   with long (over 10 mins) etches.
> 
>   The fusion might be worth looking into for those
> of you with long etches
> 
>   using photoresist masks.
> 
>   -Nancy
> 



 
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