Plasma color changed

Chong Xie chongxie.stanford at
Tue Aug 19 21:52:57 PDT 2008

Hello everyone,
I am now running the recipe 4 seasoning. I noticed that the color of the
plasma has changed. It's light purple now, and I remember it was brighter
before. And I can't see through the plasma now, before I could clearly see
the wafer and the electrode. Has anyone noticed that too? It looks really


Chong Xie
Ph. D Candidate
Cui Group
The Geballe Laboratory for Advanced Materials
476 Lomita Mall, Stanford University
Stanford, CA 94305
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the amtetcher mailing list