Plasma color changed
renshen at stanford.edu
Tue Aug 19 22:10:19 PDT 2008
Can you double check your program? I did a NF3 etch later this
afternoon. The plasma of my process has a pinkish color. Maybe you
need to run a longer conditioning for your process.
On Tue, Aug 19, 2008 at 9:52 PM, Chong Xie <chongxie.stanford at gmail.com> wrote:
> Hello everyone,
> I am now running the recipe 4 seasoning. I noticed that the color of the
> plasma has changed. It's light purple now, and I remember it was brighter
> before. And I can't see through the plasma now, before I could clearly see
> the wafer and the electrode. Has anyone noticed that too? It looks really
> Chong Xie
> Ph. D Candidate
> Cui Group
> The Geballe Laboratory for Advanced Materials
> 476 Lomita Mall, Stanford University
> Stanford, CA 94305
Department of Electrical Engineering
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