amtetcher etch rate

Takane Usui takane at
Sun Jun 29 17:22:00 PDT 2008

Hi AMT users,

I've been using the amtetcher program 3 to etch SiO2, and noticed that
the etch rate seems lower than the listed value 371A/min. Did anyone
notice the same trend? Did anyone calibrate / measure the current etch
rate of program 3? I appreciate your advice!



Takane Usui
School of Engineering Graduate Research Fellow
Rapid Prototyping Laboratory
Stanford University

takane at 

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