From chughes at its.caltech.edu Mon Mar 3 13:14:07 2008 From: chughes at its.caltech.edu (Cameron Hughes) Date: Mon, 03 Mar 2008 13:14:07 -0800 Subject: 13:00 to 15:00 Reservation Deleted Message-ID: <47CC6A1F.4030305@its.caltech.edu> 13:00 to 15:00 reservation deleted.Sorry for late notice. Cameron From grahamab at stanford.edu Tue Mar 4 16:33:52 2008 From: grahamab at stanford.edu (Andrew Graham) Date: Tue, 04 Mar 2008 16:33:52 -0800 Subject: amtetcher free 6-8pm Message-ID: <20080304163352.k55vdasr8cg0s88c@webmail.stanford.edu> AMTetcher reservation removed 6-8pm tonight. Sorry for the late notice. From jrjain at stanford.edu Thu Mar 6 14:50:23 2008 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Thu, 6 Mar 2008 14:50:23 -0800 Subject: amtetcher free at 8pm Message-ID: <001701c87fdc$76a38620$0401000a@jrjain> -------------- next part -------------- An HTML attachment was scrubbed... URL: From mpreiner at stanford.edu Sun Mar 9 16:05:02 2008 From: mpreiner at stanford.edu (Mike Preiner) Date: Sun, 9 Mar 2008 16:05:02 -0700 Subject: etching advice for PMMA on Si02? Message-ID: <000e01c8823a$01d43e60$6401a8c0@mpreiner> Hi Everyone, I'm interested in using PMMA as an etch mask for SiO2 (100nm) on Si, for relatively small features (~80nm pitch gratings) and small etch depths (10-40nm). Does anyone have experience with this sort of process? I was going to start with using the standard Si02 etch, but it has oxygen, and I'm not sure how much it will attack the PMMA. Thanks for any info you can provide! mike Mike Preiner Melosh Group Stanford University From jrjain at stanford.edu Mon Mar 10 18:46:00 2008 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Mon, 10 Mar 2008 18:46:00 -0700 Subject: amtetcher free at 8pm Message-ID: <001501c88319$a9c32a20$dc3342ab@jrjain> Apologies for late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From jsuarez at nanosysinc.com Tue Mar 25 15:36:43 2008 From: jsuarez at nanosysinc.com (Josephine Suarez) Date: Tue, 25 Mar 2008 15:36:43 -0700 Subject: AMTetcher released 3/26/08 from 10 to 12 noon Message-ID: <98A950CEC6D73D4BB644B880D0254D2F01BCABAB@mail1.at.nanosysinc.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimkruger at yahoo.com Wed Mar 26 11:50:07 2008 From: jimkruger at yahoo.com (jim kruger) Date: Wed, 26 Mar 2008 11:50:07 -0700 (PDT) Subject: finished early, looks OK after clean, used Prog 1 EOM Message-ID: <832200.69600.qm@web38903.mail.mud.yahoo.com> ____________________________________________________________________________________ Never miss a thing. Make Yahoo your home page. http://www.yahoo.com/r/hs From ahryciw at gmail.com Wed Mar 26 13:56:34 2008 From: ahryciw at gmail.com (Aaron Hryciw) Date: Wed, 26 Mar 2008 13:56:34 -0700 Subject: amtetcher released 03/27 08:30-10:00 EOM Message-ID: <4d36fb940803261356h260faa97t949d622304551b72@mail.gmail.com> -- Aaron Hryciw Postdoctoral Scholar Geballe Laboratory for Advanced Materials Stanford University 476 Lomita Mall (04-490) McCullough Building, Rm. 325 Stanford, CA 94305-4045 Tel.: (650) 723-5840 Fax.: (650) 736-1984 -------------- next part -------------- An HTML attachment was scrubbed... URL: From nlatta at stanford.edu Thu Mar 27 13:57:33 2008 From: nlatta at stanford.edu (Nancy Latta) Date: Thu, 27 Mar 2008 13:57:33 -0700 Subject: Arcing issues Message-ID: <47EC0A3D.1030201@stanford.edu> Folks, Earlier this week we had a major arcing incident, the second in about a month. Thanks to Mike Dickey the tool was not down for very long. The repair is expensive and time consuming. It is also, we think, avoidable. Please make sure that you check at every use that the tray latches are fastened correctly. The top of the hex should be completely flat. A simple visual inspection should ensure that is the case. If you have any questions about this procedure please let me know and I will be happy to go over it with you. Thanks, -Nancy