etching advice for PMMA on Si02?

Mike Preiner mpreiner at
Sun Mar 9 16:05:02 PDT 2008

Hi Everyone,

I'm interested in using PMMA as an etch mask for SiO2 (100nm) on Si, for
relatively small features (~80nm pitch gratings) and small etch depths
(10-40nm).  Does anyone have experience with this sort of process?  I was
going to start with using the standard Si02 etch, but it has oxygen, and I'm
not sure how much it will attack the PMMA.  Thanks for any info you can


Mike Preiner
Melosh Group
Stanford University

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