From rohank at stanford.edu Sat Nov 1 10:11:13 2008 From: rohank at stanford.edu (Rohan Deodatta Kekatpure) Date: Sat, 1 Nov 2008 10:11:13 -0700 (PDT) Subject: amtetcher reservation removed: Saturday 11/1 13:30--15:30 Message-ID: <1002909852.2748591225559473048.JavaMail.root@zm07.stanford.edu> From rohank at stanford.edu Sat Nov 1 18:26:35 2008 From: rohank at stanford.edu (Rohan Deodatta Kekatpure) Date: Sat, 1 Nov 2008 18:26:35 -0700 (PDT) Subject: AMT etcher reservation removed 21:30---23:30 Message-ID: <698632544.2813521225589195212.JavaMail.root@zm07.stanford.edu> From rohank at stanford.edu Mon Nov 3 18:52:12 2008 From: rohank at stanford.edu (Rohan D. Kekatpure) Date: Mon, 3 Nov 2008 18:52:12 -0800 Subject: starting my session late Message-ID: I will be starting my session at 8:00p and have accordingly removed 7:00-8:00 hour from my reservation. -Rohan From jrjain at stanford.edu Tue Nov 4 08:09:36 2008 From: jrjain at stanford.edu (Raja Jain) Date: Tue, 4 Nov 2008 08:09:36 -0800 Subject: AMT free until 9am Message-ID: <015b01c93e97$bcd8fa10$368aee30$@edu> Samples not ready. Apologies for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From xhlim at stanford.edu Thu Nov 6 10:49:35 2008 From: xhlim at stanford.edu (Xiao Hann Lim) Date: Thu, 6 Nov 2008 10:49:35 -0800 (PST) Subject: AMT Etcher free 4.30 pm Message-ID: <738272289.3915611225997375037.JavaMail.root@zm01.stanford.edu> Reservation cancelled. Wafers are not ready. From robinhmb at yahoo.com Thu Nov 6 18:40:25 2008 From: robinhmb at yahoo.com (Robin King) Date: Thu, 6 Nov 2008 18:40:25 -0800 (PST) Subject: Any AMT cancellations? Message-ID: <49814.24878.qm@web58705.mail.re1.yahoo.com> Hi, if you think you might not be able to use your reservation today or tomorrow on the AMT etcher could you please let me know??? I'd love to get an etch done before the weekend if possible. Thanks, Robin King / IBM Almaden Research Center -------------- next part -------------- An HTML attachment was scrubbed... URL: From robinhmb at yahoo.com Thu Nov 6 23:43:36 2008 From: robinhmb at yahoo.com (Robin King) Date: Thu, 6 Nov 2008 23:43:36 -0800 (PST) Subject: AMT is available Friday 8 to 10am Message-ID: <832527.46877.qm@web58708.mail.re1.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From takane at stanford.edu Fri Nov 7 16:59:41 2008 From: takane at stanford.edu (Takane Usui) Date: Fri, 07 Nov 2008 16:59:41 -0800 Subject: AMT free now-6pm Message-ID: <4914E47D.50802@stanford.edu> I'll only need one hour, sorry for late notice! -Takane From peichen at stanford.edu Fri Nov 7 21:12:54 2008 From: peichen at stanford.edu (Pei-Chen Su) Date: Fri, 7 Nov 2008 21:12:54 -0800 Subject: AMT free now to 10p Message-ID: <7d3631c70811072112g18e41517n9d0271ed8c94efcd@mail.gmail.com> I ran process 3. Pei-Chen From takane at stanford.edu Thu Nov 13 11:16:59 2008 From: takane at stanford.edu (Takane Usui) Date: Thu, 13 Nov 2008 11:16:59 -0800 Subject: amtetcher free 4p-6p today Message-ID: <491C7D2B.8070700@stanford.edu> From jcdoll at stanford.edu Sat Nov 15 20:01:24 2008 From: jcdoll at stanford.edu (Joey Doll) Date: Sat, 15 Nov 2008 20:01:24 -0800 Subject: Stopping on Si, Ti and Al Message-ID: <945664f50811152001j1a786c83w54097906d9a9beec@mail.gmail.com> Hi All - I'd like to use AMT to remove LTO that will be on top of Al, Ti and Si all at the same time, so high selectivity to both Si and metal simultaneously is required. Does anyone know the selectivity of the oxide etch program (#3) towards metals? I'm assuming that the increased polyer deposition rate of program #3 over #4 can't hurt the metal selectivity, but any information would be incredibly helpful. Thanks! Joey -------------- next part -------------- An HTML attachment was scrubbed... URL: From jlsuar at gmail.com Wed Nov 19 13:20:48 2008 From: jlsuar at gmail.com (josephine suarez) Date: Wed, 19 Nov 2008 13:20:48 -0800 Subject: Reservations removed from 10 to 11 am - 11/20/08 Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Wed Nov 19 18:06:31 2008 From: jrjain at stanford.edu (Raja Jain) Date: Wed, 19 Nov 2008 18:06:31 -0800 Subject: amtetcher free at 7am and 10am Message-ID: <002101c94ab4$9b3a2ea0$d1ae8be0$@edu> Due to ASML shutdown Jinendra Raja Jain PhD Candidate Stanford University, Department of Electrical Engineering Allen Center for Integrated Systems 420 Via Palou Stanford, CA 94305 (650) 248-0770 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jcdoll at stanford.edu Thu Nov 20 00:25:02 2008 From: jcdoll at stanford.edu (Joey Doll) Date: Thu, 20 Nov 2008 00:25:02 -0800 Subject: free thursday 8-10am Message-ID: <945664f50811200025wc8a03f1k5cff147abdedf209@mail.gmail.com> sorry for the late notice, wafers not ready -------------- next part -------------- An HTML attachment was scrubbed... URL: From rshyam at stanford.edu Thu Nov 20 02:21:17 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Thu, 20 Nov 2008 02:21:17 -0800 Subject: amtetcher free from 4 am to 7 am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Thu Nov 20 22:22:35 2008 From: jrjain at stanford.edu (Raja Jain) Date: Thu, 20 Nov 2008 22:22:35 -0800 Subject: amtetcher free at 7am Message-ID: <004d01c94ba1$8b831010$a2893030$@edu> Due to ASML shutdown -------------- next part -------------- An HTML attachment was scrubbed... URL: From jwpchen at stanford.edu Thu Nov 20 23:13:02 2008 From: jwpchen at stanford.edu (Peter Chen) Date: Thu, 20 Nov 2008 23:13:02 -0800 Subject: amtetcher free 2am-4am In-Reply-To: <004d01c94ba1$8b831010$a2893030$@edu> References: <004d01c94ba1$8b831010$a2893030$@edu> Message-ID: <49265F7E.8050409@stanford.edu> Due to upstream shutdowns, I won't be using the entire time. From jameson at stanford.edu Fri Nov 21 14:06:56 2008 From: jameson at stanford.edu (John Ross Jameson) Date: Fri, 21 Nov 2008 14:06:56 -0800 (PST) Subject: amt free now Message-ID: previous user was a no-show, so used that spot instead of my reservation From jcdoll at stanford.edu Fri Nov 21 19:18:18 2008 From: jcdoll at stanford.edu (Joey Doll) Date: Fri, 21 Nov 2008 19:18:18 -0800 Subject: Free until 8:30pm tonight Message-ID: <945664f50811211918m36a4a2feq5f07c9fcf332451a@mail.gmail.com> AMT is free for a little over an hour, I'm doing characterization before etching again. -------------- next part -------------- An HTML attachment was scrubbed... URL: From sbasumal at stanford.edu Fri Nov 21 19:43:09 2008 From: sbasumal at stanford.edu (Shrestha Basu Mallick) Date: Fri, 21 Nov 2008 19:43:09 -0800 Subject: Etcher free from 11 pm -midnight Message-ID: <49277FCD.2090102@stanford.edu> -- Shrestha Basu Mallick --------------------------------- Research Assistant E.L. Ginzton Labs 450 Via Palou S31 Stanford, CA 94305 phone: 650-455-6691 fax: 650-725-2533 email: sbasumal at stanford.edu From jlsuar at gmail.com Mon Nov 24 08:15:07 2008 From: jlsuar at gmail.com (josephine suarez) Date: Mon, 24 Nov 2008 08:15:07 -0800 Subject: Removed reservations today from 9:30 am to 11:00 am Message-ID: Wfs not ready due to ASML DOWN. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jcdoll at stanford.edu Tue Nov 25 07:36:02 2008 From: jcdoll at stanford.edu (Joey Doll) Date: Tue, 25 Nov 2008 07:36:02 -0800 Subject: free 9:30pm - midnight today Message-ID: <945664f50811250736l5c3ac4c2m90096686dfee2a83@mail.gmail.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From nharjee at stanford.edu Wed Nov 26 14:52:09 2008 From: nharjee at stanford.edu (Nahid Harjee) Date: Wed, 26 Nov 2008 14:52:09 -0800 Subject: Reservation released 3-4 pm today Message-ID: <2feeb6700811261452i19903620y445e21d07723a1b9@mail.gmail.com> Need to redo litho. -- Nahid Harjee Ph.D. Candidate Electrical Engineering Stanford University 408-761-8651 -------------- next part -------------- An HTML attachment was scrubbed... URL: From raneeyoo at stanford.edu Wed Nov 26 15:38:55 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Wed, 26 Nov 2008 15:38:55 -0800 (PST) Subject: Reservation released 4-6 pm today In-Reply-To: <2feeb6700811261452i19903620y445e21d07723a1b9@mail.gmail.com> Message-ID: <802571918.906521227742735459.JavaMail.root@zm06.stanford.edu> Litho is not good. thanks, Kyeongran From johana at stanford.edu Thu Nov 27 16:34:28 2008 From: johana at stanford.edu (Johan Andreasson) Date: Thu, 27 Nov 2008 16:34:28 -0800 (PST) Subject: AMT released 23.30-01.30 tonight Message-ID: <55581409.1156601227832468325.JavaMail.root@zm01.stanford.edu> From sbasumal at stanford.edu Thu Nov 27 17:39:18 2008 From: sbasumal at stanford.edu (Shrestha Basu Mallick) Date: Thu, 27 Nov 2008 17:39:18 -0800 Subject: Amt released from 2.00 am - 3.30 am tonight Message-ID: <492F4BC6.3090200@stanford.edu> Reserved an hr from earlier released slot which may or may not be used. Can't say for sure but keep checking reservations if you need a long slot -- Shrestha Basu Mallick --------------------------------- Research Assistant E.L. Ginzton Labs 450 Via Palou S31 Stanford, CA 94305 phone: 650-455-6691 fax: 650-725-2533 email: sbasumal at stanford.edu From johan at andreasson.com Fri Nov 28 12:01:13 2008 From: johan at andreasson.com (Johan Andreasson) Date: Fri, 28 Nov 2008 12:01:13 -0800 Subject: Released at 13 Message-ID: <49304E09.5070604@andreasson.com> From raneeyoo at stanford.edu Fri Nov 28 13:06:17 2008 From: raneeyoo at stanford.edu (Kyeongran Yoo) Date: Fri, 28 Nov 2008 13:06:17 -0800 (PST) Subject: AMTETCHER free from 2:30 to 3pm In-Reply-To: <49304E09.5070604@andreasson.com> Message-ID: <134454400.1026391227906377763.JavaMail.root@zm06.stanford.edu> From lwchang at stanford.edu Sat Nov 29 11:34:47 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Sat, 29 Nov 2008 11:34:47 -0800 Subject: amtetcher free 2-5.30pm Message-ID: <8ab79e460811291134u30eb3c1bp4e5e10e72951f9dd@mail.gmail.com> samples not ready. sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... 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