Stopping on Si, Ti and Al

Joey Doll jcdoll at stanford.edu
Sat Nov 15 20:01:24 PST 2008


Hi All -
I'd like to use AMT to remove LTO that will be on top of Al, Ti and Si all
at the same time, so high selectivity to both Si and metal simultaneously is
required. Does anyone know the selectivity of the oxide etch program (#3)
towards metals? I'm assuming that the increased polyer deposition rate of
program #3 over #4 can't hurt the metal selectivity, but any information
would be incredibly helpful.

Thanks!
Joey
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