From takane at stanford.edu Sun Sep 7 13:56:11 2008 From: takane at stanford.edu (Takane Usui) Date: Sun, 07 Sep 2008 13:56:11 -0700 Subject: amtecher released this afternoon Message-ID: <48C43FEB.3030105@stanford.edu> I had a long reservation on amtetcher this afternoon, but I just canceled since another tool I needed is down.... I'm sorry for the inconvenience. Takane From jlsuar at gmail.com Tue Sep 16 13:34:26 2008 From: jlsuar at gmail.com (josephine suarez) Date: Tue, 16 Sep 2008 13:34:26 -0700 Subject: Reservations removed for 9/17/08 from 11 to 1pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From lwchang at stanford.edu Wed Sep 17 12:51:59 2008 From: lwchang at stanford.edu (Li-Wen Chang) Date: Wed, 17 Sep 2008 12:51:59 -0700 Subject: Amtetcher free 2-3pm Message-ID: <8ab79e460809171251m5efb47afj8289d9b1b11cd50d@mail.gmail.com> From eenriquez at snf.stanford.edu Wed Sep 17 19:11:36 2008 From: eenriquez at snf.stanford.edu (Elmer Enriquez) Date: Wed, 17 Sep 2008 19:11:36 -0700 Subject: Low etch rate problem update Message-ID: <48D1B8D8.8030904@snf.stanford.edu> Robin, Eric and I went through the system constants and found the all the gas flow controller (AFCs) sizes and correction factors were incorrect. The gas controller parameters are OK now but we need to verify the rest of the system constants tomorrow. We will also need to verify all the etch rates. I will leave the system in "yellow" but if you are using the tool tonight, please proceed with caution. Elmer From dogdoe at gmail.com Thu Sep 25 17:26:58 2008 From: dogdoe at gmail.com (Chong Xie) Date: Thu, 25 Sep 2008 17:26:58 -0700 Subject: reservation deleted tonight 9-midnight Message-ID: <00cc01c91f6e$97520bd0$c5f62370$@com> Sample wont be ready -- Chong Xie Ph. D Candidate Cui Group The Geballe Laboratory for Advanced Materials 476 Lomita Mall, Stanford University Stanford, CA 94305 -------------- next part -------------- An HTML attachment was scrubbed... URL: From wessmith at stanford.edu Sun Sep 28 20:48:14 2008 From: wessmith at stanford.edu (Wes Scott Smith) Date: Sun, 28 Sep 2008 20:48:14 -0700 (PDT) Subject: Res removed 9am-11am Message-ID: <730563710.2191501222660094914.JavaMail.root@zm06.stanford.edu> Wafers not ready, sorry for the late notice. From dogdoe at gmail.com Sun Sep 28 20:57:04 2008 From: dogdoe at gmail.com (Chong Xie) Date: Sun, 28 Sep 2008 20:57:04 -0700 Subject: amt free till 10:30 Message-ID: <02e101c921e7$70269af0$5073d0d0$@com> -- Chong Xie Ph. D Candidate Cui Group The Geballe Laboratory for Advanced Materials 476 Lomita Mall, Stanford University Stanford, CA 94305 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rshyam at stanford.edu Mon Sep 29 18:33:46 2008 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Mon, 29 Sep 2008 18:33:46 -0700 Subject: amtetcher free from 11.30 pm to 1.30 am tonight Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From johana at stanford.edu Tue Sep 30 13:02:47 2008 From: johana at stanford.edu (Johan Andreasson) Date: Tue, 30 Sep 2008 13:02:47 -0700 Subject: amtetcher free 15.30-17.00 and after midnight In-Reply-To: References: Message-ID: <48E285E7.3050703@stanford.edu> From ahryciw at gmail.com Tue Sep 30 13:05:30 2008 From: ahryciw at gmail.com (Aaron Hryciw) Date: Tue, 30 Sep 2008 13:05:30 -0700 Subject: amtetcher free 15.30-17.00 and after midnight In-Reply-To: <48E285E7.3050703@stanford.edu> References: <48E285E7.3050703@stanford.edu> Message-ID: <4d36fb940809301305q3e92fa54h2441c649411e4011@mail.gmail.com> Took it and released 17:30 to 19:00. - Aaron -- Aaron Hryciw Postdoctoral Scholar Geballe Laboratory for Advanced Materials Stanford University 476 Lomita Mall (04-490) McCullough Building, Rm. 325 Stanford, CA 94305-4045 Tel.: (650) 723-5840 Fax.: (650) 736-1984 -------------- next part -------------- An HTML attachment was scrubbed... URL: