Low etch rate problem update

Elmer Enriquez eenriquez at snf.stanford.edu
Wed Sep 17 19:11:36 PDT 2008


Robin, Eric and I went through the system constants and found the all 
the gas flow controller (AFCs) sizes and correction factors were 
incorrect.  The gas controller parameters are OK now but we need to 
verify the rest of the  system constants tomorrow.  We will also need to 
verify all the etch rates.  I will leave the system in "yellow" but if 
you are using the tool tonight, please proceed with caution.

Elmer



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