From lwchang at stanford.edu  Tue Aug  4 16:58:54 2009
From: lwchang at stanford.edu (Li-Wen Chang)
Date: Tue, 4 Aug 2009 16:58:54 -0700 (PDT)
Subject: prog 3 flow 1 out of limit
Message-ID: <45528560.14235971249430334444.JavaMail.root@zm03.stanford.edu>

Dear amt users,
I'm trying to run prog 3 on amtetcher. The set flow for gas1 is 6sccm
and the actual flow is 6sccm but the system keeps showing flow1 out
limit and would not proceed.
Does anyone know how to solve this?

Thanks
Li-Wen


From shott at stanford.edu  Tue Aug  4 17:15:46 2009
From: shott at stanford.edu (John Shott)
Date: Tue, 04 Aug 2009 17:15:46 -0700
Subject: prog 3 flow 1 out of limit
In-Reply-To: <45528560.14235971249430334444.JavaMail.root@zm03.stanford.edu>
References: <45528560.14235971249430334444.JavaMail.root@zm03.stanford.edu>
Message-ID: <4A78CF32.5000106@stanford.edu>

Li-Wen et al:

I've dug up a old document that details some "under the covers" 
parameters that need to be updated following a "Red EPO Button Off" 
event.  One of them adjusts the "Max vent time" that will, I suspect, 
address the issue that other's have seen recently.  While I can't 
guarantee that the others will fix the problem that you are currently on 
gas 1, I suspect that these changes should be made ....

I expect to be in there by about 5:30 ...

John



From lwchang at stanford.edu  Tue Aug  4 17:58:07 2009
From: lwchang at stanford.edu (Li-Wen Chang)
Date: Tue, 4 Aug 2009 17:58:07 -0700 (PDT)
Subject: prog 3 flow 1 out of limit
Message-ID: <1203197150.14245271249433887181.JavaMail.root@zm03.stanford.edu>

Dear all,
John came in and fixed the parameters...
As far as I know the corr. factor for all gases were not correct before my run.
So previous users may want to check your etch results carefully.

Now prog3 seems to work.

Thanks
Li-Wen
- Hide quoted text -

On Tue, Aug 4, 2009 at 5:15 PM, John Shott<shott at stanford.edu> wrote:
> Li-Wen et al:
>
> I've dug up a old document that details some "under the covers" parameters
> that need to be updated following a "Red EPO Button Off" event.  One of them
> adjusts the "Max vent time" that will, I suspect, address the issue that
> other's have seen recently.  While I can't guarantee that the others will
> fix the problem that you are currently on gas 1, I suspect that these
> changes should be made ....
>
> I expect to be in there by about 5:30 ...
>
> John
>
>


From jrjain at stanford.edu  Wed Aug 12 11:18:23 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Wed, 12 Aug 2009 11:18:23 -0700
Subject: amtetcher free at noon
Message-ID: <007501ca1b79$476ba470$d642ed50$@edu>

 

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From lwchang at stanford.edu  Wed Aug 12 14:58:09 2009
From: lwchang at stanford.edu (Li-Wen Chang)
Date: Wed, 12 Aug 2009 14:58:09 -0700 (PDT)
Subject: AMTetcher free 3-4p
Message-ID: <1846820371.276471250114289894.JavaMail.root@zm03.stanford.edu>

process delayed...


From raneeyoo at stanford.edu  Thu Aug 13 17:08:39 2009
From: raneeyoo at stanford.edu (Kyeongran Yoo)
Date: Thu, 13 Aug 2009 17:08:39 -0700 (PDT)
Subject: amtetcher free until 6:30pm finished early (EOM)
Message-ID: <1704521633.521981250208519300.JavaMail.root@zm06.stanford.edu>



From slcheng at stanford.edu  Mon Aug 17 20:43:21 2009
From: slcheng at stanford.edu (Szu-Lin Cheng)
Date: Mon, 17 Aug 2009 20:43:21 -0700
Subject: AMTetcher free from now to 23:00
Message-ID: <000301ca1fb6$08a8a760$19f9f620$@edu>

Finished early

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From slcheng at stanford.edu  Tue Aug 18 19:15:47 2009
From: slcheng at stanford.edu (Szu-Lin Cheng)
Date: Tue, 18 Aug 2009 19:15:47 -0700
Subject: AMTetcher is free until 22:00
Message-ID: <001201ca2072$f785c4a0$e6914de0$@edu>

 

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From jrjain at stanford.edu  Wed Aug 26 19:24:38 2009
From: jrjain at stanford.edu (Raja Jain)
Date: Wed, 26 Aug 2009 19:24:38 -0700
Subject: amtetcher free at 7:30pm
Message-ID: <000301ca26bd$872d0730$95871590$@edu>

Apologies for the late notice

 

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