prog 3 flow 1 out of limit

Li-Wen Chang lwchang at stanford.edu
Tue Aug 4 16:58:54 PDT 2009


Dear amt users,
I'm trying to run prog 3 on amtetcher. The set flow for gas1 is 6sccm
and the actual flow is 6sccm but the system keeps showing flow1 out
limit and would not proceed.
Does anyone know how to solve this?

Thanks
Li-Wen



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