prog 3 flow 1 out of limit

Li-Wen Chang lwchang at stanford.edu
Tue Aug 4 17:58:07 PDT 2009


Dear all,
John came in and fixed the parameters...
As far as I know the corr. factor for all gases were not correct before my run.
So previous users may want to check your etch results carefully.

Now prog3 seems to work.

Thanks
Li-Wen
- Hide quoted text -

On Tue, Aug 4, 2009 at 5:15 PM, John Shott<shott at stanford.edu> wrote:
> Li-Wen et al:
>
> I've dug up a old document that details some "under the covers" parameters
> that need to be updated following a "Red EPO Button Off" event.  One of them
> adjusts the "Max vent time" that will, I suspect, address the issue that
> other's have seen recently.  While I can't guarantee that the others will
> fix the problem that you are currently on gas 1, I suspect that these
> changes should be made ....
>
> I expect to be in there by about 5:30 ...
>
> John
>
>



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