prog 3 flow 1 out of limit
lwchang at stanford.edu
Tue Aug 4 17:58:07 PDT 2009
John came in and fixed the parameters...
As far as I know the corr. factor for all gases were not correct before my run.
So previous users may want to check your etch results carefully.
Now prog3 seems to work.
- Hide quoted text -
On Tue, Aug 4, 2009 at 5:15 PM, John Shott<shott at stanford.edu> wrote:
> Li-Wen et al:
> I've dug up a old document that details some "under the covers" parameters
> that need to be updated following a "Red EPO Button Off" event. One of them
> adjusts the "Max vent time" that will, I suspect, address the issue that
> other's have seen recently. While I can't guarantee that the others will
> fix the problem that you are currently on gas 1, I suspect that these
> changes should be made ....
> I expect to be in there by about 5:30 ...
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