prog 3 flow 1 out of limit

Li-Wen Chang lwchang at
Tue Aug 4 17:58:07 PDT 2009

Dear all,
John came in and fixed the parameters...
As far as I know the corr. factor for all gases were not correct before my run.
So previous users may want to check your etch results carefully.

Now prog3 seems to work.

- Hide quoted text -

On Tue, Aug 4, 2009 at 5:15 PM, John Shott<shott at> wrote:
> Li-Wen et al:
> I've dug up a old document that details some "under the covers" parameters
> that need to be updated following a "Red EPO Button Off" event.  One of them
> adjusts the "Max vent time" that will, I suspect, address the issue that
> other's have seen recently.  While I can't guarantee that the others will
> fix the problem that you are currently on gas 1, I suspect that these
> changes should be made ....
> I expect to be in there by about 5:30 ...
> John

More information about the amtetcher mailing list