amtetcher free until 5/7 21:30

Aaron Hryciw ahryciw at stanford.edu
Thu May 7 16:02:49 PDT 2009


Problem with SF6 supply?  There was no SF6 flow, causing a flow time-out
alarm.  SF6 valve behind tool appears to be open.

 - Aaorn


-- 
Dr. Aaron Hryciw
Postdoctoral Scholar
Geballe Laboratory for Advanced Materials
Stanford University
476 Lomita Mall (04-490)
McCullough Building, Rm. 325
Stanford, CA  94305-4045

Tel.:  (650) 723-5840
Fax.:  (650) 736-1984
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