Continued lack of SF6 in amtetcher

Aaron Hryciw ahryciw at stanford.edu
Fri May 22 16:07:08 PDT 2009


Hello,

I tried running a recipe involving O2 and SF6 again today:  as before (May
7th), the SF6 flow remains at zero during the "wait flow" stage, although
oxygen stabilised as normal.  Has any progress been made in tracking down
the reason for this (since update on May 11th)?  Have any lab members
successfully used SF6 in amtetcher?

Cheers!

 - Aaron


-- 
Dr. Aaron Hryciw
Postdoctoral Scholar
Geballe Laboratory for Advanced Materials
Stanford University
476 Lomita Mall (04-490)
McCullough Building, Rm. 325
Stanford, CA  94305-4045

Tel.:  (650) 723-5840
Fax.:  (650) 736-1984
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