From nlatta at stanford.edu  Tue Jan  5 15:58:45 2010
From: nlatta at stanford.edu (Nancy Latta)
Date: Tue, 05 Jan 2010 15:58:45 -0800
Subject: Amtetcher update- leaky vent valve
Message-ID: <4B43D235.3020807@stanford.edu>

Folks,

The vent valve on the amtetcher is leaking at an unacceptable rate 
(20mT/min) into the process chamber.  This means that during all recipes 
N2 is present during the etch.

The fix requires replacing an ancient valve and modifying the manifold 
to accommodate the new valve.  It should take 3-4 days to complete.

If you really, really need to use the tool and you are convinced that 
the N2 will not adversely affect your results we will arrange for you to 
use the amtetcher by taking it off of shutdown.  We do, however, advise 
against using the tool until the repair is made.

Thanks,

Team Amt




From mtang at stanford.edu  Wed Jan 13 13:37:48 2010
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 13 Jan 2010 13:37:48 -0800
Subject: Alternatives to etching Zero Level Marks
Message-ID: <4B4E3D2C.1000604@stanford.edu>

Hi all --


Just a reminder that lampoly can also be used for etching zero-level 
ASML marks.  Usha Raghuram has just run some wafers and her results will 
be posted shortly on the wiki.  She has also set up recipe #3 for this, 
so we'll add this to the sacred recipe roster.


Mary


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From nlatta at stanford.edu  Wed Jan 13 13:53:27 2010
From: nlatta at stanford.edu (Nancy Latta)
Date: Wed, 13 Jan 2010 13:53:27 -0800
Subject: Alternatives to etching Zero Level Marks
In-Reply-To: <4B4E3D2C.1000604@stanford.edu>
References: <4B4E3D2C.1000604@stanford.edu>
Message-ID: <4B4E40D7.2040705@stanford.edu>

Folks,

Here is the wiki link to all the etch tools with ASML zero-level mark 
recipe;

https://snf.stanford.edu/SNF/processes/process-modules/etching/dry-etching

Enjoy!

-Nancy

Mary Tang wrote:
> Hi all --
>
>
> Just a reminder that lampoly can also be used for etching zero-level 
> ASML marks.  Usha Raghuram has just run some wafers and her results 
> will be posted shortly on the wiki.  She has also set up recipe #3 for 
> this, so we'll add this to the sacred recipe roster.
>
>
> Mary
>
>