From jrjain at stanford.edu  Sun Oct 10 16:52:13 2010
From: jrjain at stanford.edu (Raja Jain)
Date: Sun, 10 Oct 2010 16:52:13 -0700
Subject: amtetcher free at 5:30pm
Message-ID: <006601cb68d6$2a0cc0c0$7e264240$@edu>

Shifted to later time

 

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From xzhuang at stanford.edu  Mon Oct 11 18:06:27 2010
From: xzhuang at stanford.edu (Steve Zhuang)
Date: Mon, 11 Oct 2010 18:06:27 -0700 (PDT)
Subject: AMT etcher free till 8pm
In-Reply-To: <30441_1282244072_4C6D7DE8_30441_519_1_500DF4D6-B02A-4130-B947-19A9ED3A61F3@stanford.edu>
Message-ID: <78868417.50870.1286845587576.JavaMail.root@zm02.stanford.edu>

done early.

Steve Zhuang


From cfchiang at stanford.edu  Mon Oct 11 20:45:55 2010
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Mon, 11 Oct 2010 20:45:55 -0700 (PDT)
Subject: AMTetcher reservation release 5-7pm
Message-ID: <1890341646.59898.1286855155096.JavaMail.root@zm06.stanford.edu>



From cfchiang at stanford.edu  Wed Oct 13 08:34:16 2010
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Wed, 13 Oct 2010 08:34:16 -0700 (PDT)
Subject: amtetcher reservation release today 3-5p
Message-ID: <1163660777.105588.1286984056045.JavaMail.root@zm06.stanford.edu>

sorry for the late notice, sample won't be ready


From cfchiang at stanford.edu  Mon Oct 18 20:27:49 2010
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Mon, 18 Oct 2010 20:27:49 -0700 (PDT)
Subject: amtetcher free tomorrow evening
Message-ID: <1668205516.260901.1287458869645.JavaMail.root@zm06.stanford.edu>

sorry for the short notice


From xzhuang at stanford.edu  Tue Oct 19 13:40:53 2010
From: xzhuang at stanford.edu (Steve Zhuang)
Date: Tue, 19 Oct 2010 13:40:53 -0700 (PDT)
Subject: AMT etcher free 4-6 pm
Message-ID: <1853255700.254636.1287520853295.JavaMail.root@zm02.stanford.edu>

Wafers not ready. 

Steve Zhuang (xzhuan1)


From xzhuang at stanford.edu  Wed Oct 20 17:04:47 2010
From: xzhuang at stanford.edu (Steve Zhuang)
Date: Wed, 20 Oct 2010 17:04:47 -0700 (PDT)
Subject: amt etcher released 6-8 pm
Message-ID: <417246550.293325.1287619487030.JavaMail.root@zm02.stanford.edu>

wafers not ready.

Steve Zhuang (xzhuan1)


From npapte at stanford.edu  Fri Oct 22 15:49:06 2010
From: npapte at stanford.edu (Nikhil Apte)
Date: Fri, 22 Oct 2010 15:49:06 -0700
Subject: program #4 etch rate on amtetcher
Message-ID: <AANLkTik-qtqjzAxyJ5teSecr_aPYwa572amaaGKJ74SO@mail.gmail.com>

Hi,

I have to run a critical Si etch on amtetcher using program #4. I know there
have been some issues with low etch rate in the last few days. Does anyone
have any recent characterization results, especially for program #4?

Thanks,
Nikhil
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From jcdoll at stanford.edu  Thu Oct 28 16:33:03 2010
From: jcdoll at stanford.edu (Joey Doll)
Date: Thu, 28 Oct 2010 16:33:03 -0700
Subject: amtetcher free 5:30-6:30
Message-ID: <AANLkTi=vEi_8xE2N6HeY2iSKDDaD6uSLAb_rLpUK=8VE@mail.gmail.com>

was able to take an earlier slot
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From cfchiang at stanford.edu  Fri Oct 29 17:49:49 2010
From: cfchiang at stanford.edu (Chia-Fang Chiang)
Date: Fri, 29 Oct 2010 17:49:49 -0700 (PDT)
Subject: AMTetcher reservation released tonight 10:30pm - 1:00am
Message-ID: <1425011282.186823.1288399789144.JavaMail.root@zm06.stanford.edu>

took earlier slot