program #4 etch rate on amtetcher

Nikhil Apte npapte at stanford.edu
Fri Oct 22 15:49:06 PDT 2010


Hi,

I have to run a critical Si etch on amtetcher using program #4. I know there
have been some issues with low etch rate in the last few days. Does anyone
have any recent characterization results, especially for program #4?

Thanks,
Nikhil
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