From nharjee at stanford.edu  Sun Jul  3 18:21:09 2011
From: nharjee at stanford.edu (Nahid Harjee)
Date: Sun, 3 Jul 2011 18:21:09 -0700
Subject: Etching ASML targets with amtetcher
Message-ID: <CAC9hAneZG_dGqBng26=F2K4O+b+3+CXZ1q1w_s0Z1rP9ZNAKZg@mail.gmail.com>

Hi amtetcher community,

Have any of you recently used amtetcher to successfully etch ASML targets?
The recommended process is 5 min of Program 4. In November 2010 when I last
ran this process, it yielded trench depths of 1150 A (measured with zygo)
which is close to the desired 1200 A. However, when I ran it again
yesterday, the trench depths were only 700 A. Have others also noticed this
large change in etch rate?

Thanks,

nh

-- 
Nahid Harjee
Ph.D. Candidate
Electrical Engineering
Stanford University
408-761-8651
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From bwchui at yahoo.com  Thu Jul  7 18:37:03 2011
From: bwchui at yahoo.com (Benjamin Chui)
Date: Thu, 7 Jul 2011 18:37:03 -0700 (PDT)
Subject: Etching ASML targets with amtetcher
In-Reply-To: <CAC9hAneZG_dGqBng26=F2K4O+b+3+CXZ1q1w_s0Z1rP9ZNAKZg@mail.gmail.com>
Message-ID: <1310089023.74060.YahooMailClassic@web36506.mail.mud.yahoo.com>

I did a 5.4 minute (recipe 4) etch on the AMT yesterday (July 6) and got an etch depth of 0.16um per Zygo.

Ben

--- On Sun, 7/3/11, Nahid Harjee <nharjee at stanford.edu> wrote:

From: Nahid Harjee <nharjee at stanford.edu>
Subject: Etching ASML targets with amtetcher
To: amtetcher at snf.stanford.edu
Date: Sunday, July 3, 2011, 6:21 PM

Hi amtetcher community,

Have any of you recently used amtetcher to successfully etch ASML targets? The recommended process is 5 min of Program 4. In November 2010 when I last ran this process, it yielded trench depths of 1150 A (measured with zygo) which is close to the desired 1200 A. However, when I ran it again yesterday, the trench depths were only 700 A. Have others also noticed this large change in etch rate?


Thanks,

nh

-- 
Nahid Harjee
Ph.D. Candidate
Electrical Engineering
Stanford University
408-761-8651

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From bwchui at yahoo.com  Thu Jul  7 19:06:10 2011
From: bwchui at yahoo.com (Benjamin Chui)
Date: Thu, 7 Jul 2011 19:06:10 -0700 (PDT)
Subject: Etching ASML targets with amtetcher
In-Reply-To: <1310089023.74060.YahooMailClassic@web36506.mail.mud.yahoo.com>
Message-ID: <1310090770.17270.YahooMailClassic@web36502.mail.mud.yahoo.com>

Correction: for unrelated reasons I did do a 3-minute Recipe-3 etch beforehand on the same wafer with the same resist pattern, which is expected to take off around 100A .? So the next etch depth attributable to recipe 4 should be about 0.15um.

Ben

--- On Thu, 7/7/11, Benjamin Chui <bwchui at yahoo.com> wrote:

From: Benjamin Chui <bwchui at yahoo.com>
Subject: Re: Etching ASML targets with amtetcher
To: amtetcher at snf.stanford.edu, "Nahid Harjee" <nharjee at stanford.edu>
Date: Thursday, July 7, 2011, 6:37 PM

I did a 5.4 minute (recipe 4) etch on the AMT yesterday (July 6) and got an etch depth of 0.16um per Zygo.

Ben

--- On Sun, 7/3/11, Nahid Harjee <nharjee at stanford.edu> wrote:

From: Nahid Harjee <nharjee at stanford.edu>
Subject: Etching ASML targets with amtetcher
To: amtetcher at snf.stanford.edu
Date: Sunday, July 3, 2011, 6:21 PM

Hi amtetcher community,

Have any of you recently used amtetcher to successfully etch ASML targets? The recommended process is 5 min of Program 4. In November 2010 when I last ran this process, it yielded trench depths of 1150 A (measured with zygo) which is close to the desired 1200 A. However, when I ran it again yesterday, the trench depths were
 only 700 A. Have others also noticed this large change in etch rate?


Thanks,

nh

-- 
Nahid Harjee
Ph.D. Candidate
Electrical Engineering
Stanford University
408-761-8651

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From sclaussen at stanford.edu  Tue Jul 19 00:01:22 2011
From: sclaussen at stanford.edu (Stephanie Claussen)
Date: Tue, 19 Jul 2011 00:01:22 -0700
Subject: amtetcher available tomorrow 10:30am-12:30pm
Message-ID: <CAM9W0+YOkoFSM-HMpyaCfQg3dRdz7iH7NgMmioe1D6A10ois0g@mail.gmail.com>

Litho step did not work.
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From sclaussen at stanford.edu  Tue Jul 19 16:10:37 2011
From: sclaussen at stanford.edu (Stephanie Claussen)
Date: Tue, 19 Jul 2011 16:10:37 -0700
Subject: amtetcher available 6:30pm-8:30pm
Message-ID: <CAM9W0+arCp+0NXX2=dxCEUx9wsyQhy=1a00hErd2MgktioEfvA@mail.gmail.com>

Delayed due to ASML shutdown.
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