Etching ASML targets with amtetcher
nharjee at stanford.edu
Sun Jul 3 18:21:09 PDT 2011
Hi amtetcher community,
Have any of you recently used amtetcher to successfully etch ASML targets?
The recommended process is 5 min of Program 4. In November 2010 when I last
ran this process, it yielded trench depths of 1150 A (measured with zygo)
which is close to the desired 1200 A. However, when I ran it again
yesterday, the trench depths were only 700 A. Have others also noticed this
large change in etch rate?
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the amtetcher