Etching ASML targets with amtetcher

Nahid Harjee nharjee at
Sun Jul 3 18:21:09 PDT 2011

Hi amtetcher community,

Have any of you recently used amtetcher to successfully etch ASML targets?
The recommended process is 5 min of Program 4. In November 2010 when I last
ran this process, it yielded trench depths of 1150 A (measured with zygo)
which is close to the desired 1200 A. However, when I ran it again
yesterday, the trench depths were only 700 A. Have others also noticed this
large change in etch rate?



Nahid Harjee
Ph.D. Candidate
Electrical Engineering
Stanford University
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