From nlatta at stanford.edu Tue Sep 6 14:28:06 2011 From: nlatta at stanford.edu (Nancy Latta) Date: Tue, 06 Sep 2011 14:28:06 -0700 Subject: REMINDER: Please announce cancellations of reservations Message-ID: <4E669066.1070001@stanford.edu> Folks, Please let other users of the etcher know when you will not be using your reservation via this mail list. It can be quite frustrating to plan around reservations that end up not being used. Thanks, Team Etch From ysohn at stanford.edu Thu Sep 8 13:25:25 2011 From: ysohn at stanford.edu (Young Ik Sohn) Date: Thu, 8 Sep 2011 13:25:25 -0700 (PDT) Subject: AMTetcher released today 18:00~19:30 Message-ID: <1932697291.131690.1315513525607.JavaMail.root@zm08.stanford.edu> litho not done yet From sclaussen at stanford.edu Fri Sep 9 09:54:20 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Fri, 9 Sep 2011 09:54:20 -0700 Subject: amtetcher available 1-3pm Message-ID: Wafers won't be ready. From ludwig.galambos at gmail.com Sat Sep 10 13:00:09 2011 From: ludwig.galambos at gmail.com (Ludwig G.) Date: Sat, 10 Sep 2011 13:00:09 -0700 Subject: remove rez. on Monday 10AM till 11:30AM Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From ysohn at stanford.edu Mon Sep 12 19:07:01 2011 From: ysohn at stanford.edu (Young Ik Sohn) Date: Mon, 12 Sep 2011 19:07:01 -0700 (PDT) Subject: amtetcher released tomorrow 08:30~10:00 AM Message-ID: <1989675634.262989.1315879621661.JavaMail.root@zm08.stanford.edu> From cearhart at stanford.edu Wed Sep 14 16:19:46 2011 From: cearhart at stanford.edu (Christopher M Earhart) Date: Wed, 14 Sep 2011 16:19:46 -0700 (PDT) Subject: AMT reservation released 8-10 pm (need NF3) Message-ID: <794292230.192825.1316042386495.JavaMail.root@zm03.stanford.edu> From cfchiang at stanford.edu Fri Sep 16 00:52:43 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Fri, 16 Sep 2011 00:52:43 -0700 (PDT) Subject: amtetcher free Friday 9-11am In-Reply-To: <554856856.1525953.1316156987907.JavaMail.root@zm06.stanford.edu> Message-ID: <998974328.1526154.1316159563682.JavaMail.root@zm06.stanford.edu> used an earlier slot. -------------- next part -------------- An HTML attachment was scrubbed... URL: From cfchiang at stanford.edu Fri Sep 16 19:30:25 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Fri, 16 Sep 2011 19:30:25 -0700 (PDT) Subject: amtetcher free tomorrow morning Message-ID: <1001772658.1552401.1316226625008.JavaMail.root@zm06.stanford.edu> sample won't be ready -------------- next part -------------- An HTML attachment was scrubbed... URL: From cfchiang at stanford.edu Sat Sep 17 16:49:57 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Sat, 17 Sep 2011 16:49:57 -0700 (PDT) Subject: amtetcher free now to 6:30p Message-ID: <1874543873.1562244.1316303397554.JavaMail.root@zm06.stanford.edu> sorry for the late notice. sample not ready Chia-Fang -------------- next part -------------- An HTML attachment was scrubbed... URL: From sclaussen at stanford.edu Mon Sep 19 12:59:07 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Mon, 19 Sep 2011 12:59:07 -0700 Subject: amtetcher available 1-3pm today Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From cfchiang at stanford.edu Mon Sep 19 18:33:36 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Mon, 19 Sep 2011 18:33:36 -0700 (PDT) Subject: amtetcher free tonight 9-11pm Message-ID: <1693883811.1604588.1316482416548.JavaMail.root@zm06.stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From cfchiang at stanford.edu Wed Sep 21 22:57:07 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Wed, 21 Sep 2011 22:57:07 -0700 (PDT) Subject: amtetcher free Thursday 9:30-11:30am Message-ID: <1822528632.1676418.1316671027591.JavaMail.root@zm06.stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From qran at stanford.edu Thu Sep 22 14:09:33 2011 From: qran at stanford.edu (Qiushi (Helen) Ran) Date: Thu, 22 Sep 2011 14:09:33 -0700 (PDT) Subject: amtether release from 3pm Message-ID: <2023847145.682496.1316725773018.JavaMail.root@zm04.stanford.edu> Sample is not ready Qiushi(Helen) Ran ========================================= Department of Electrical Engineering Stanford University, Stanford, CA 94305. Mobile: +1-650-796-1439 Email: qran at stanford.edu From mtang at stanford.edu Thu Sep 29 16:53:10 2011 From: mtang at stanford.edu (Mary Tang) Date: Thu, 29 Sep 2011 16:53:10 -0700 Subject: Update on process gases (BCl3, NF3) Message-ID: <4E8504E6.9030000@stanford.edu> Etcher users: As you should note from the problem logs on equipment, we are running extremely low on BCl3 (pquest, p5000etch) and are out of NF3 (p5000etch, amtetcher). If you have critical processes, you may wish to delay processing with BCl3. If you are using BCl3, please make sure to watch your gas flows; abort the process if flows drop. BCl3 has been on order for a month and is overdue, but Elmer has just been informed that it will ship tomorrow, due to arrive next Wednesday, Oct. 5. Please be warned that your reservation on or near the arrival date may be taken over to allow for cylinder replacement and testing. We do not have a status update for NF3 as yet. The spare bottle was ordered in good time, but found to be empty. A second bottle is overdue and we are trying to track it. We deeply apologize for the disruptions. Team Etch (Elmer, Nancy, Cesar, Mike) -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu