From bindermann at snf.stanford.edu Thu Aug 2 13:32:03 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 2 Aug 2007 13:32:03 -0700 Subject: Comment asml SNF 2007-08-02 13:32:02: asml Message-ID: Training From bindermann at snf.stanford.edu Thu Aug 2 13:32:39 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 2 Aug 2007 13:32:39 -0700 Subject: Comment asml SNF 2007-08-02 13:32:38: E0 swing curve Message-ID: Exposed 15 wafers for e0 swing curve From bindermann at snf.stanford.edu Thu Aug 2 13:35:31 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 2 Aug 2007 13:35:31 -0700 Subject: Comment asml SNF 2007-08-02 13:35:30: Training Message-ID: training From bindermann at snf.stanford.edu Thu Aug 2 13:36:31 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 2 Aug 2007 13:36:31 -0700 Subject: Comment asml SNF 2007-08-02 13:36:30: training Mahnaz Message-ID: Hands on Training From bindermann at snf.stanford.edu Thu Aug 2 13:37:08 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 2 Aug 2007 13:37:08 -0700 Subject: Comment asml SNF 2007-08-02 13:37:08: training Message-ID: Hands on training From bindermann at snf.stanford.edu Fri Aug 3 12:33:35 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Fri, 3 Aug 2007 12:33:35 -0700 Subject: Comment asml SNF 2007-08-03 12:33:35: eric Message-ID: exposed 25 wafers at waive guide layer From gsosa at snf.stanford.edu Mon Aug 6 09:19:35 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 6 Aug 2007 09:19:35 -0700 Subject: Comment asml SNF 2007-08-06 09:19:35: IQC Test Message-ID: Unable t run IQC test. Rebooted subsystem CPU's. Did a full start-up. Ran IQC test. All OK. From binder.mann at asml.com Mon Aug 6 09:28:47 2007 From: binder.mann at asml.com (Binder Mann) Date: Mon, 6 Aug 2007 12:28:47 -0400 Subject: Comment asml SNF 2007-08-06 09:19:35: IQC Test In-Reply-To: <20070806161935.5AA814C872@smtp3.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF6133CC20@USWILX84.sn-us.asml.com> Thanks Gary, can you please check the error log, what was the problem. Regards, Binder -----Original Message----- From: gsosa at snf.stanford.edu [mailto:gsosa at snf.stanford.edu] Sent: Monday, August 06, 2007 09:20 To: asml-pcs at snf.stanford.edu Subject: Comment asml SNF 2007-08-06 09:19:35: IQC Test Unable t run IQC test. Rebooted subsystem CPU's. Did a full start-up. Ran IQC test. All OK. -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From mahnaz at snf.stanford.edu Mon Aug 6 09:39:28 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 6 Aug 2007 09:39:28 -0700 Subject: Comment asml SNF 2007-08-06 09:39:27: pm and edge sensor Message-ID: installation and calibration. If all goes as plan we should have the afternoon of Thursday. From bindermann at snf.stanford.edu Wed Aug 8 09:45:53 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Wed, 8 Aug 2007 09:45:53 -0700 Subject: Comment asml SNF 2007-08-08 09:45:52: Monthly PM and conversion to 6" Message-ID: Perform Monthly PM, convert to 6", install new edge sensor From mahnaz at snf.stanford.edu Wed Aug 8 11:47:20 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Aug 2007 11:47:20 -0700 Subject: Comment asml SNF 2007-08-08 11:47:19: system is in 6" Message-ID: ASML only to use the system. From uli at snf.stanford.edu Thu Aug 9 18:22:10 2007 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 9 Aug 2007 18:22:10 -0700 Subject: Comment asml SNF 2007-08-09 18:22:10: back to 4" Message-ID: System is back to 4". Read to use. Mahnaz From masaharu at snf.stanford.edu Sun Aug 12 17:20:30 2007 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 12 Aug 2007 17:20:30 -0700 Subject: Problem asml SNF 2007-08-12 17:20:30: IQC test failed Message-ID: I planed to expose PM marks. Before that, I run daily check, IQC test. But it failed. So, unloaded ASML reticles and logout. From binder.mann at asml.com Mon Aug 13 07:39:37 2007 From: binder.mann at asml.com (Binder Mann) Date: Mon, 13 Aug 2007 10:39:37 -0400 Subject: Problem asml SNF 2007-08-12 17:20:30: IQC test failed In-Reply-To: <20070813002030.C9E164C7D6@smtp2.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF6133CC31@USWILX84.sn-us.asml.com> Hi Masaharu, Please contact Gary Sosa about the problem, he should be able to help you, if possible please look at the logging and send me the error log. Thanks and good luck, Binder -----Original Message----- From: masaharu at snf.stanford.edu [mailto:masaharu at snf.stanford.edu] Sent: Sunday, August 12, 2007 17:21 To: asml-pcs at snf.stanford.edu Subject: Problem asml SNF 2007-08-12 17:20:30: IQC test failed I planed to expose PM marks. Before that, I run daily check, IQC test. But it failed. So, unloaded ASML reticles and logout. -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From gsosa at snf.stanford.edu Mon Aug 13 08:33:14 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Aug 2007 08:33:14 -0700 Subject: Problem asml SNF 2007-08-12 17:20:30: IQC test failed Message-ID: Reset the system CPU's. Did full startup. Performed daily checkout, including IQC test. All OK. GS From binder.mann at asml.com Mon Aug 13 09:01:15 2007 From: binder.mann at asml.com (Binder Mann) Date: Mon, 13 Aug 2007 12:01:15 -0400 Subject: Problem asml SNF 2007-08-12 17:20:30: IQC test failed In-Reply-To: <20070813153314.C339D4C2A9@smtp2.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF6133CC32@USWILX84.sn-us.asml.com> Hi gary, Thanks, can you please look at the logging for why it failed and send us the text of logging (only the error portion if possible. Thanks, Binder -----Original Message----- From: gsosa at snf.stanford.edu [mailto:gsosa at snf.stanford.edu] Sent: Monday, August 13, 2007 08:33 To: asml-pcs at snf.stanford.edu Subject: Re: Problem asml SNF 2007-08-12 17:20:30: IQC test failed Reset the system CPU's. Did full startup. Performed daily checkout, including IQC test. All OK. GS -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From mtang at snf.stanford.edu Mon Aug 13 09:23:27 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 13 Aug 2007 09:23:27 -0700 Subject: Comment asml SNF 2007-08-13 09:23:26: Intermittent IQC problem Message-ID: If an IQC problem is noted, put the system down on Coral and notify maintenance. From gsosa at snf.stanford.edu Wed Aug 15 08:11:58 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Aug 2007 08:11:58 -0700 Subject: Shutdown asml SNF 2007-08-15 08:11:58: Focus out of spec Message-ID: IQC test measured focus at -.99 microns. Bottles for lens pressure switched over in the last 24 hours. Will notify ASM-L. GS From gsosa at snf.stanford.edu Wed Aug 15 11:53:01 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Aug 2007 11:53:01 -0700 Subject: Shutdown asml SNF 2007-08-15 08:11:58: Focus out of spec Message-ID: Focus correction made by ASM-L applications group. GS From afong at snf.stanford.edu Fri Aug 17 13:37:38 2007 From: afong at snf.stanford.edu (afong at snf.stanford.edu) Date: Fri, 17 Aug 2007 13:37:38 -0700 Subject: Comment asml SNF 2007-08-17 13:37:38: for jrjain Message-ID: run zero layer From mahnaz at snf.stanford.edu Fri Aug 17 13:58:26 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 17 Aug 2007 13:58:26 -0700 Subject: Comment asml SNF 2007-08-17 13:58:25: Lamp change Message-ID: I wa just told that there will be lamp change at 2:30 by ASML FSE. From fengj at snf.stanford.edu Sat Aug 18 19:11:55 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 18 Aug 2007 19:11:55 -0700 Subject: Shutdown asml SNF 2007-08-18 19:11:55: failed start-up Message-ID: When doing the full start-up, the machine said "CT not initialized" and "Energy sensor temperature out of range". From gsosa at snf.stanford.edu Mon Aug 20 09:06:20 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Aug 2007 09:06:20 -0700 Subject: Shutdown asml SNF 2007-08-18 19:11:55: failed start-up Message-ID: Reset the system CPU's. Did full startup. Ran daily checks. All OK. GS From mahnaz at snf.stanford.edu Mon Aug 20 14:07:07 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 20 Aug 2007 14:07:07 -0700 Subject: Shutdown asml SNF 2007-08-20 14:07:06: I just saw the ASml FSE working Message-ID: on the st`ystem on the focus. he says that he cmmunicated with DGary if understood correctly the system will be down. From gsosa at snf.stanford.edu Mon Aug 20 16:19:26 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Aug 2007 16:19:26 -0700 Subject: Shutdown asml SNF 2007-08-20 14:07:06: I just saw the ASml FSE working Message-ID: ASM-L field service was here to address the IQC and the focus drift issues we have been having on the tool. He collected the logging data from the last IQC failure. The data will be analysed by ASM-l. He will return tomorrow to do stone to lens tilt and re-baseline the system. System is up and OK to use for now. GS From masaharu at snf.stanford.edu Wed Aug 22 07:41:55 2007 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 22 Aug 2007 07:41:55 -0700 Subject: Problem asml SNF 2007-08-22 07:41:55: output port#4 does not move Message-ID: When I run my batch, output port #4 didn't move. I removed wafer from input port#3 From binder.mann at asml.com Wed Aug 22 08:00:14 2007 From: binder.mann at asml.com (Binder Mann) Date: Wed, 22 Aug 2007 11:00:14 -0400 Subject: Problem asml SNF 2007-08-22 07:41:55: output port#4 does not move In-Reply-To: <20070822144155.CD6714CED8@smtp3.stanford.edu> Message-ID: <0788D5A046D0134DB5F0CEF36E4EBF6133CC48@USWILX84.sn-us.asml.com> Hi Masaharu, Did you enable the system in Coral prior scheduling your lot on the system, if not that could be the problem, if yes then the cassette may not be loaded right. We are here today we will look in the problem. Thanks, Binder -----Original Message----- From: masaharu at snf.stanford.edu [mailto:masaharu at snf.stanford.edu] Sent: Wednesday, August 22, 2007 07:42 To: asml-pcs at snf.stanford.edu Subject: Problem asml SNF 2007-08-22 07:41:55: output port#4 does not move When I run my batch, output port #4 didn't move. I removed wafer from input port#3 -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From gsosa at snf.stanford.edu Wed Aug 22 08:16:17 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 22 Aug 2007 08:16:17 -0700 Subject: Shutdown asml SNF 2007-08-22 08:16:17: System is hung up Message-ID: System is hung up at batch control menu. Will not exit the batch control menu. Will leave system in current condition so that ASL-L can see the problem. GS From mahnaz at snf.stanford.edu Wed Aug 22 10:23:18 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 22 Aug 2007 10:23:18 -0700 Subject: Shutdown asml SNF 2007-08-22 08:16:17: System is hung up Message-ID: the problem caused by user trying to run FEM. Binder has explained tand created the correct job for the individual. From mahnaz at snf.stanford.edu Wed Aug 22 10:24:41 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 22 Aug 2007 10:24:41 -0700 Subject: Problem asml SNF 2007-08-22 07:41:55: output port#4 does not move Message-ID: cassett was put in incorrectly From gsosa at snf.stanford.edu Thu Aug 23 06:59:46 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Aug 2007 06:59:46 -0700 Subject: Comment asml SNF 2007-08-17 13:58:25: Lamp change Message-ID: Lamp change completed fy ASM-L FSE. GS From bindermann at snf.stanford.edu Thu Aug 23 09:33:26 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 23 Aug 2007 09:33:26 -0700 Subject: Comment asml SNF 2007-08-23 09:33:25: asml Message-ID: convert to 6", test new edge sensor and perform semo on 151mm glass wafers From bindermann at snf.stanford.edu Thu Aug 23 10:09:55 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 23 Aug 2007 10:09:55 -0700 Subject: Comment asml SNF 2007-08-23 10:09:54: 6" conversion Message-ID: Convert to 6", test edge sensor and perform demo om 151mm Glass wafers From bindermann at snf.stanford.edu Thu Aug 23 10:11:09 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 23 Aug 2007 10:11:09 -0700 Subject: Comment asml SNF 2007-08-23 10:11:08: 6" conversion Message-ID: test special edge sensor and run demo on 151mm glass holder wafers From bindermann at snf.stanford.edu Thu Aug 23 10:11:43 2007 From: bindermann at snf.stanford.edu (bindermann at snf.stanford.edu) Date: Thu, 23 Aug 2007 10:11:43 -0700 Subject: Comment asml SNF 2007-08-23 10:11:42: 6 inch demo Message-ID: test special edge sensor and run demo on 151mm glass holder wafers From rmelamud at snf.stanford.edu Wed Aug 29 01:27:27 2007 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Wed, 29 Aug 2007 01:27:27 -0700 Subject: Problem asml SNF 2007-08-29 01:27:26: Robot won't let my wafer go :( Message-ID: Robot has my wafer, but machine doesn't recognize the wafer is there. The dialog window isn't responding. Tried everthing I knew to remove it, but no luck. I'll be in at 7am to see if someone can remove it. Sorry to users after me tonight From gsosa at snf.stanford.edu Wed Aug 29 07:44:08 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 29 Aug 2007 07:44:08 -0700 Subject: Problem asml SNF 2007-08-29 01:27:26: Robot won't let my wafer go :( Message-ID: Manually removed stranded wafer from the WTS robot. Also rebooted the system software because it was locked up. Did full start-up. All OK. GS From gsosa at snf.stanford.edu Fri Aug 31 12:06:44 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 31 Aug 2007 12:06:44 -0700 Subject: Shutdown asml SNF 2007-08-31 12:06:44: System down for XY stage problem Message-ID: XY Stage will not initialize after conversion to 4 inch. ASML field service office has been notified. GS