Problem asml SNF 2007-08-12 17:20:30: IQC test failed

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Sun Aug 12 17:20:30 PDT 2007


I planed to expose PM marks.
Before that, I run daily check, IQC test.
But  it failed. So, unloaded ASML reticles and logout.




More information about the asml-pcs mailing list