Problem asml SNF 2007-08-12 17:20:30: IQC test failed

Binder Mann binder.mann at
Mon Aug 13 07:39:37 PDT 2007

 Hi Masaharu,
Please contact Gary Sosa about the problem, he should be able to help
you, if possible please look at the logging and send me the error log.
Thanks and good luck,

-----Original Message-----
From: masaharu at [mailto:masaharu at] 
Sent: Sunday, August 12, 2007 17:21
To: asml-pcs at
Subject: Problem asml SNF 2007-08-12 17:20:30: IQC test failed

I planed to expose PM marks.
Before that, I run daily check, IQC test.
But  it failed. So, unloaded ASML reticles and logout.

The information contained in this communication and any attachments is confidential
and may be privileged, and is for the sole use of the intended recipient(s). Any
unauthorized review, use, disclosure or distribution is prohibited. If you are not
the intended recipient, please notify the sender immediately by replying to this
message and destroy all copies of this message and any attachments. ASML is neither
liable for the proper and complete transmission of the information contained in this
communication, nor for any delay in its receipt.

More information about the asml-pcs mailing list