Problem asml SNF 2007-08-12 17:20:30: IQC test failed
binder.mann at asml.com
Mon Aug 13 07:39:37 PDT 2007
Please contact Gary Sosa about the problem, he should be able to help
you, if possible please look at the logging and send me the error log.
Thanks and good luck,
From: masaharu at snf.stanford.edu [mailto:masaharu at snf.stanford.edu]
Sent: Sunday, August 12, 2007 17:21
To: asml-pcs at snf.stanford.edu
Subject: Problem asml SNF 2007-08-12 17:20:30: IQC test failed
I planed to expose PM marks.
Before that, I run daily check, IQC test.
But it failed. So, unloaded ASML reticles and logout.
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