Shutdown asml SNF 2007-08-15 08:11:58: Focus out of spec

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 15 08:11:58 PDT 2007

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IQC test measured focus at -.99 microns. Bottles for lens pressure switched over in the last 24 hours. Will notify ASM-L.  GS

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