Shutdown asml SNF 2007-08-20 14:07:06: I just saw the ASml FSE working

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 20 16:19:26 PDT 2007


ASM-L field service was here to address the IQC and the focus drift issues we have been having on the tool. He collected the logging data from the last IQC failure. The data will be analysed by ASM-l. He will return tomorrow to do stone to lens tilt and re-baseline the system. System is up and OK to use for now. GS 




More information about the asml-pcs mailing list