Problem asml SNF 2007-08-22 07:41:55: output port#4 does not move

Binder Mann binder.mann at asml.com
Wed Aug 22 08:00:14 PDT 2007


 
Hi Masaharu,
Did you enable the system in Coral prior scheduling your lot on the
system, if not that could be the problem, if yes then the cassette may
not be loaded right. We are here today we will look in the problem.
Thanks, Binder

-----Original Message-----
From: masaharu at snf.stanford.edu [mailto:masaharu at snf.stanford.edu] 
Sent: Wednesday, August 22, 2007 07:42
To: asml-pcs at snf.stanford.edu
Subject: Problem asml SNF 2007-08-22 07:41:55: output port#4 does not
move

When I run my batch, output port #4 didn't move.
I removed wafer from input port#3



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