Problem asml SNF 2007-08-22 07:41:55: output port#4 does not move
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Wed Aug 22 10:24:41 PDT 2007
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Problem asml SNF 2007-08-22 07:41:55: output port#4 does not move
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cassett was put in incorrectly
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Problem asml SNF 2007-08-22 07:41:55: output port#4 does not move
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Shutdown asml SNF 2007-08-22 08:16:17: System is hung up
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