Problem asml SNF 2007-08-29 01:27:26: Robot won't let my wafer go :(

rmelamud at snf.stanford.edu rmelamud at snf.stanford.edu
Wed Aug 29 01:27:27 PDT 2007


Robot has my wafer, but machine doesn't recognize the wafer is there. The dialog window isn't responding. Tried everthing I knew to remove it, but no luck. I'll be in at 7am to see if someone can remove it. Sorry to users after me tonight 




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