Problem asml SNF 2007-08-29 01:27:26: Robot won't let my wafer go :(

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 29 07:44:08 PDT 2007


Manually removed stranded wafer from the WTS robot. Also rebooted the system software because it was locked up. Did full start-up. All OK.  GS




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