Shutdown asml SNF 2007-08-31 12:06:44: System down for XY stage problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Aug 31 12:06:44 PDT 2007

Previous message: Problem asml SNF 2007-08-29 01:27:26: Robot won't let my wafer go :(
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

XY Stage will not initialize after conversion to 4 inch. ASML field service office has been notified.  GS

Previous message: Problem asml SNF 2007-08-29 01:27:26: Robot won't let my wafer go :(
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the asml-pcs mailing list