From emyers at snf.stanford.edu Sat Dec 8 04:12:18 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 8 Dec 2007 04:12:18 -0800 Subject: Shutdown asml SNF 2007-12-08 04:12:17: Power Outage Message-ID: Need ASML to restart tool From gsosa at snf.stanford.edu Sat Dec 8 19:30:27 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 8 Dec 2007 19:30:27 -0800 Subject: Comment asml SNF 2007-12-08 19:30:27: Stepper Status Message-ID: Powered up system Saturday @ 5:00PM. Booted up software and initialized all hardware. Restarted and warmed up UV lamp. Uniformity at 1.56%. System air water and lens temperatures still stabilizing. System focus is at .213 microns. Stepper still down while it continues to stabilize. GS From gsosa at snf.stanford.edu Sun Dec 9 13:17:57 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 9 Dec 2007 13:17:57 -0800 Subject: Comment asml SNF 2007-12-09 13:17:56: Stepper Update Message-ID: Rechecked IQC after 18 hours stabilization. Focus improved slightly but image tilt( X and Y) and stone to lens tilt (X and Y ) are beyond the update limits of the tool. Stepper is still down. Will notify ASM-l of stepper condition. GS From gsosa at snf.stanford.edu Mon Dec 10 10:59:07 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Dec 2007 10:59:07 -0800 Subject: Problem asml SNF 2007-12-10 10:59:07: Use with caution Message-ID: The stepper is powered up and stable. However there is some focus shift and image tilt. We are working with ASM-L to resolve the issues. If your work does not require the tool at optimum condition, you may use the system at your own risk. From gsosa at snf.stanford.edu Mon Dec 10 11:00:07 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Dec 2007 11:00:07 -0800 Subject: Shutdown asml SNF 2007-12-08 04:12:17: Power Outage Message-ID: System is back on and stabilized. THere is some focus shift and image tilt. We are working with ASM-L to resolve. Please use system at your own risk. From gsosa at snf.stanford.edu Mon Dec 17 10:39:51 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 17 Dec 2007 10:39:51 -0800 Subject: Shutdown asml SNF 2007-12-17 10:39:51: Regulator Install Message-ID: Installing HeO2 regulator. Annual PM and software upgrade. Tool will be down all week. GS From gsosa at snf.stanford.edu Mon Dec 17 16:26:12 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 17 Dec 2007 16:26:12 -0800 Subject: Comment asml SNF 2007-12-17 16:26:11: Stepper Update 12/17/07 Message-ID: Installed new inline HE/O2 regulator at tool. Used helium leakchecker to sniff all new joint connections. All tested OK. System is in lens purge mode to flush contamination. ASM-L Vendor began PM. UV lamp replaced. All critical surfaces cleaned. Stage bearings and rods cleaned and lubed. Work will continue tomorrow(12/18). Stepper Down- Do Not Use.