Comment asml SNF 2007-12-08 19:30:27: Stepper Status

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Dec 8 19:30:27 PST 2007


Powered up system Saturday @ 5:00PM. Booted up software and initialized all hardware. Restarted and warmed up UV lamp. Uniformity at 1.56%. System air water and lens temperatures still stabilizing. System focus is at .213 microns. Stepper still down while it continues to stabilize.  GS 




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